Jae-Man Yoon, Kang-yoon Lee, Seung-bae Park, Seong-goo Kim, H. Seo, Young-woong Son, Bong-soo Kim, Hyun-Woo Chung, Choong-ho Lee, Wonshik Lee, Dong-chan Kim, Donggun Park, Wonshik Lee, B. Ryu
{"title":"A Novel Low Leakage Current VPT(Vertical Pillar Transistor) Integration for 4F2 DRAM Cell Array with sub 40 nm Technology","authors":"Jae-Man Yoon, Kang-yoon Lee, Seung-bae Park, Seong-goo Kim, H. Seo, Young-woong Son, Bong-soo Kim, Hyun-Woo Chung, Choong-ho Lee, Wonshik Lee, Dong-chan Kim, Donggun Park, Wonshik Lee, B. Ryu","doi":"10.1109/DRC.2006.305083","DOIUrl":null,"url":null,"abstract":"for 4F2 DRAM Cell Array with sub 40 nm Technology Jae-Man Yoon, Kangyoon Lee, Seung-Bae Park, Seong-Goo Kim, Hyoung-Won Seo, Young-Woong Son, Bong-Soo Kim, Hyun-Woo Chung, Choong-Ho Lee*, Won-Sok Lee* *, Dong-Chan Kim* * *, Donggun Park*, Wonshik Lee and Byung-Il Ryu ATD Team, Device Research Team*, CAEP*, PD Team***, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, 449-711, Korea Tel) 82-31-209-4741, Fax) 82-31-209-3274, E-mail)","PeriodicalId":259981,"journal":{"name":"2006 64th Device Research Conference","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"13","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 64th Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2006.305083","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 13
Abstract
for 4F2 DRAM Cell Array with sub 40 nm Technology Jae-Man Yoon, Kangyoon Lee, Seung-Bae Park, Seong-Goo Kim, Hyoung-Won Seo, Young-Woong Son, Bong-Soo Kim, Hyun-Woo Chung, Choong-Ho Lee*, Won-Sok Lee* *, Dong-Chan Kim* * *, Donggun Park*, Wonshik Lee and Byung-Il Ryu ATD Team, Device Research Team*, CAEP*, PD Team***, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, 449-711, Korea Tel) 82-31-209-4741, Fax) 82-31-209-3274, E-mail)
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
