Electrospun ZnO nanofibers for sensors application

Abstract

In the presented work, a review of electrospun ZnO nanofibers in sensor applications are shown. Devices sensed on harmful substances such as: toxic and combustible gases or volatile organic compounds vapours are included. Various constructions of sensors and methods of their fabrication are compared. Sensing properties of semiconducting metal oxides 1D structures have also been discussed. Technological issues of fabricated devices with electrospun ZnO nanofibers using a standard microelectronic technology especially photolithography and lift-off process was shown. Solutions of the process technology improvement using protective layer will also be presented.