Embedded SRAM and Cortex-M0 core with backup circuits using a 60-nm crystalline oxide semiconductor for power gating

Abstract

A chip of embedded SRAM having backup circuits using a 60-nm c-axis aligned crystalline oxide semiconductor (CAAC-OS) such as CAAC indium-gallium-zinc oxide (CAAC-IGZO) and Cortex-M0 core having flip-flops with CAAC-OS backup circuits is fabricated. The SRAM and M0 core can retain data using the backup circuits during power-off; thus, they can perform power gating (PG) with backup time of 100 ns and recovery time of 10 clock cycles (including data restoration time (100 ns)). Further, memory cell area and performance in combining a 45-nm Si SRAM memory cell with 60-nm CAAC-OS are estimated to have negligible overhead.