A metrological scanning probe microscope

Abstract

A metrological scanning probe microscope (SPM) has been jointly developed and manufactured by NIM (China) and PTB (Germany). This instrument is a "sample scan" SPM. A new and high precision scanning X-Y table (monolithic flecxible hinge type) equipped with capacitance transducers for all 6 axis and is controlled by a corresponding digital signal, and it is made of aluminum. The Z-scanner uses a built-in capacitance transducer for its active element. The X-Y scan is generated in a closed feedback-loop. This SPM includes a two tip holder in the Z-scanner, one is for tunnel-tip and the other is for needle sensor. This construction is very convenience for different types of measurement STM and AFM. The measurements of the instrument are controlled by a computer with a DSP card and a IEEE card. The IEEE card can drive the X-Y scanning table by a digital signal. The software of this system was written in C language and IDL language. The program for controling the DSP card and data collection was written in C language.