A high-sensitivity 135GHz millimeter-wave imager by differential transmission-line loaded split-ring-resonator in 65nm CMOS

Abstract

A high-sensitivity 135GHz millimeter-wave (mm-wave) imager is demonstrated in 65nm CMOS by on-chip metamaterial resonator: a differential transmission-line (T-line) loaded with split-ring-resonator (DTL-SRR). Due to sharp stop-band introduced by metamaterial load, high-Q oscillatory amplification can be achieved with high sensitivity when utilizing DTL-SRR as quench-controlled oscillator to provide regenerative detection. The developed mm-wave imager pixel has a compact core chip area of 0.0085mm2 with measured power consumption of 6.2mW, sensitivity of -76.8dBm, noise figure of 9.7dB, and noise equivalent power of 0.9fW/√Hz with demonstrated mm-wave images.