The study of light doped chromium SI-GaAs single crystal in the LEC technology

Jinliang Yuan, Dege Qi, Zhanping Lai, S. Niu, G. Du, Yanfeng Liu
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Abstract

In this paper, a special technique using light doped or super-light doped (LDC or SLDC) chromium is reported with a LEC system. It is able to obtain repeatedly SI-GaAs crystals of high resistivity and mobility, and to decrease resistivity inhomogeneities substantially. A new model of the compensation mechanism for LDC and SLDC is established.
光掺杂铬SI-GaAs单晶在LEC技术中的研究
本文报道了一种在LEC体系中使用光掺杂或超光掺杂(LDC或SLDC)铬的特殊技术。它能够获得高电阻率和高迁移率的SI-GaAs晶体,并大大降低电阻率不均匀性。建立了一种新的最不发达国家和最不发达国家补偿机制模型。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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