Surface trapping effects observed in AlGaN/GaN HFETs and heterostructures

G. Koley, V. Tilak, H. Cha, L. Eastman, M. Spencer
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引用次数: 1

Abstract

We have observed very slow surface potential transients in AlGaN/GaN HFETs induced by high drain and gate bias stresses. The surface potential has been observed to change as much as 2.5 V near the gate. It is proposed that the change in surface potential is caused by electrons that tunnel from the gate and get trapped at the surface states. The increase in the net negative charge at the surface raises the surface barrier, which in turn reduces the 2DEG concentration. Simultaneous measurements of surface electrostatic potential and drain current indicate that the transients have similar transient responses and are therefore related. A spatial map of the surface potential change after stress with respect to time shows that maximum changes occur close to the gate. Exposure to UV laser light completely eliminates the transients, while large reduction in transient magnitude has been observed for devices passivated with SiN/sub x/. Contrary to the gate and drain stress, UV laser exposure of AlGaN/GaN heterostructure samples has been observed to reduce the surface barrier, which slowly increases following a stretched exponential type transient after the laser is switched off. Such an observation is explained by the creation of electron-hole pairs, which decrease the net charge dipole across the AlGaN barrier and lower the barrier. The transient response is modeled by thermionic emission of electrons from the interface, which recombine with the holes trapped at the surface.
在AlGaN/GaN hfet和异质结构中观察到表面俘获效应
我们观察到在高漏极和栅偏置应力诱导下,AlGaN/GaN hfet的表面电位瞬变非常缓慢。观察到在栅极附近的表面电位变化高达2.5 V。提出表面电位的变化是由电子从栅极隧穿出来并被困在表面态引起的。表面净负电荷的增加提高了表面势垒,这反过来又降低了2DEG浓度。同时测量表面静电电位和漏极电流表明,瞬态具有相似的瞬态响应,因此是相关的。应力后表面电位随时间变化的空间图显示,最大的变化发生在栅极附近。暴露在紫外激光下完全消除了瞬态,而用SiN/sub x/钝化的器件的瞬态幅度大大降低。与栅极和漏极应力相反,在紫外激光照射下,AlGaN/GaN异质结构样品的表面势垒降低,在激光关闭后,表面势垒在一个拉伸指数型瞬态后缓慢增加。这样的观察结果可以用电子-空穴对的产生来解释,电子-空穴对减少了穿过AlGaN势垒的净电荷偶极子并降低了势垒。瞬态响应是通过界面上电子的热离子发射来模拟的,这些电子与被困在表面的空穴重新结合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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