Preliminary Round of OPC Development in 180nm node Silicon Photonics MPW platform

Zengzhi Huang, Zhenguo Zheng, Shijie Chen, Junbo Feng, Weiran Huang, G. Cao
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引用次数: 1

Abstract

Silicon photonic has become an enabling technology in a variety of applications such as telecommunication, datacenter interconnect, LiDAR, optical sensing and quantum computing. However, many research groups or fabless companies lack the access to the manufacturing facilities of silicon photonics devices, which are compatible with the CMOS technology. Multi-project wafer (MPW) service will be an agreeable solution for them. Optical proximity correction (OPC) is essential in silicon photonics MPW platform. In this paper we introduce the preliminary OPC development efforts in CUMEC's 180 nm node silicon photonics MPW platform.
在180nm节点硅光子MPW平台上的OPC初步开发
硅光子已经成为电信、数据中心互连、激光雷达、光学传感和量子计算等各种应用的使能技术。然而,许多研究小组或无晶圆厂公司缺乏与CMOS技术兼容的硅光子器件的制造设施。多项目晶圆(MPW)服务将是一个令人满意的解决方案。光学接近校正(OPC)在硅光子MPW平台中是必不可少的。本文介绍了在CUMEC的180nm节点硅光子MPW平台上OPC的初步开发工作。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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