2020 International Workshop on Advanced Patterning Solutions (IWAPS)

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2020 International Workshop on Advanced Patterning Solutions (IWAPS) - 最新文献

Mask Optimization based on artificial desired pattern

Pub Date : 2020-11-05 DOI: 10.1109/IWAPS51164.2020.9286796 Fei Peng, Chengqun Gui, Yi Song, Yijiang Shen

OPO Measurement Improvement in Advanced DRAM with Tunable Wavelength Imaging

Pub Date : 2020-11-05 DOI: 10.1109/IWAPS51164.2020.9286806 Yunsheng Xia, Rui Qin, Andy Lan, Joer Huang, Congcong Fan, Shaowen Qiu, Dong Xue, Dashuai Tao, Kun Gao, Haoran Li, Shu Lu, Hongpeng Su, Linfei Gao, Jinyan Song

Machine Learning Hotspot Prediction Significantly Improve Capture Rate on Wafer

Pub Date : 2020-11-05 DOI: 10.1109/IWAPS51164.2020.9286795 Wei Yuan, Yifei Lu, Ming Li, Bingyang Pan, Ying Gao, Yu Tian, Zhi-qin Li, Liang Ji, Ying Huang, Hao Chen, Yueliang Yao, Sean Park

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