Investigation of ESD Devices Turn-On Time Definitions

Abstract

This paper explores and compares three definitions for evaluating turn-on time (tON) of ESD devices under charged device model (CDM) type stress. The behavior of SCR and STI diode protection devices in the time-domain is investigated using vf-TLP tester. Each tON definition is applied on the characterization data using specially developed automation tool, designed to help extract parameters out of waveforms.