Study on the Patterning Process using an Electromagnetic Actuator

Abstract

Hot embossing is a widely used technique for making fine patterns necessary for electronic devices, wearable devices, microfluidic channels and optical devices. In the conventional hot embossing process, heat and pressure are applied to a polymer film using a stamp having a pattern previously engraved. This method is disadvantageous in that it takes only a shape stamped on the stamp, and it takes a lot of time and cost to change the shape or change the stamp to replace the stamp. To improve this point, the research group proposed an impact — based hot embossing process technology capable of free-form patterns, and developed equipment to realize this. And experiments are conducted to take a pattern of several tens of micrometers in size. For this purpose, we have developed an electromagnetic actuator for implementing impact type hot embossing and have researched to reduce the size of the actuator compared to previous studies. The patterning experiment is performed using the developed device and idea, and it is possible to fabricate dot shaped fine patterns of 60 um diameter. The size of the pattern generated by using this method was confirmed by a confocal microscope, and it was found through the proposed hot embossing process that the desired shape could be realized at any position using the proposed technique.