Fabrication of 40 kHz receiving piezoelectric micro-machined ultrasonic transducers

Abstract

This paper presents the fabrication of piezoelectric micro-machined ultrasonic transducers (PMUT) used in acoustic location field in the air. The transducer consists of piezoelectric ZnO thin film and the membrane made of Si3N4. The calculation of the vibration mode of PMUT has been made by the FEM method. Experiment results indicate the resonant frequency of the PMUT is 43.7 kHz. The initial results on receiving experiment using the PMUT as the receiver with the matching circuit are also presented.