Manipulating biological and mechanical micro-objects using LIGA-microfabricated end-effectors

Abstract

We first discuss some general aspects of micromanipulation and possible different approaches. Then, we present new results in the micromanipulation of mechanical and biological objects. The apparatus we use is a purposely developed workstation comprising macro- and micro-manipulators. The most innovative component of the workstation is a micro-gripper fabricated using LIGA technology and actuated by piezoelectric actuators. We describe the design, fabrication and performance of a few prototypes of LIGA micro-grippers. Results are presented which demonstrate the ability of the system to manipulate effectively both micro-mechanical and biological micro-objects.