Optical elements for the extreme ultraviolet and soft X-ray range

Abstract

The article presents the physical basis and overview of optical elements for the rangeincluding extreme ultraviolet (EUV) and soft X-ray (SXR). The first chapter contains an introductionto the subject under review and physical fundamentals. The second chapter presents the basics ofoptics for the EUV/SXR range, along with highlighting its advantages and disadvantages. The thirdchapter discusses in detail optical components such as optical filters, mirrors (including multilayers),diffraction gratings, Fresnel zone plates, and hybrid solutions. The fourth chapter presents a wide rangeof applications of EUV/SXR optics. The final chapter summarises the information presented earlier.Keywords: automation, electronic and electrical engineering, soft X-rays, extreme ultraviolet, opticalelements, optical filters, multilayer mirrors, diffraction gratings, Fresnel zone plates