B. Romanowicz, M. Laudon, P. Lerch, P. Renaud, H. Amann, A. Boegli, Vincent Moser, F. Pellandini
{"title":"Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language","authors":"B. Romanowicz, M. Laudon, P. Lerch, P. Renaud, H. Amann, A. Boegli, Vincent Moser, F. Pellandini","doi":"10.1109/EDTC.1997.582344","DOIUrl":null,"url":null,"abstract":"The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-A/sup TM/, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.","PeriodicalId":297301,"journal":{"name":"Proceedings European Design and Test Conference. ED & TC 97","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1997-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings European Design and Test Conference. ED & TC 97","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTC.1997.582344","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10
Abstract
The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-A/sup TM/, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.
本文采用非线性集总参数法对微系统中的保守静电、电磁和电动力换能器进行了解析建模和仿真。将该方法与线性化等效电路方法进行了比较。所有型号的传感器都是用HDL- a /sup TM/编写的,这是一种专有的模拟硬件描述语言(HDL)。在SPICE模拟器中使用换能器的行为模型进行系统级仿真。最后,提出了一种用于器件的参数提取和HDL模型生成工具。