Modeling and simulation of electromechanical transducers in microsystems using an analog hardware description language

B. Romanowicz, M. Laudon, P. Lerch, P. Renaud, H. Amann, A. Boegli, Vincent Moser, F. Pellandini
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引用次数: 10

Abstract

The analytical modeling and simulation of conservative electrostatic, electromagnetic and electrodynamic transducers found in microsystems using a non-linear lumped-parameter approach is presented in this paper. A comparison is made between this approach and the linearized equivalent circuit method. All models of transducers are written in HDL-A/sup TM/, a proprietary analogue hardware description language (HDL). System-level simulation is performed in the SPICE simulator using behavioral models of the transducers. Finally, a parameter extraction and HDL model generation tool for devices is presented.
用模拟硬件描述语言对微系统中机电换能器进行建模和仿真
本文采用非线性集总参数法对微系统中的保守静电、电磁和电动力换能器进行了解析建模和仿真。将该方法与线性化等效电路方法进行了比较。所有型号的传感器都是用HDL- a /sup TM/编写的,这是一种专有的模拟硬件描述语言(HDL)。在SPICE模拟器中使用换能器的行为模型进行系统级仿真。最后,提出了一种用于器件的参数提取和HDL模型生成工具。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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