Performance Enhancement of Gap Closing Electrostatic MEMS Converters

2006 International Conference on MEMS, NANO, and Smart Systems Pub Date : 2006-12-01 DOI:10.1109/ICMENS.2006.348214

M. Salem, M. Salem, A. Zekry, H. F. Ragai

引用次数: 0

Abstract

This paper proposes new ideas to enhance the output power of the gap closing electrostatic MEMS converters. This is done by including the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter has increased by increasing the converter thickness

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闭式静电MEMS变换器的性能提升

本文提出了提高闭口静电MEMS变换器输出功率的新思路。这是通过在输出功率方程中包括变换器并联电容的影响来实现的。此外，变换器的输出功率也随着变换器厚度的增加而增加

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2006 International Conference on MEMS, NANO, and Smart Systems

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