High-resolution 3D imaging of surface damage sites in fused silica with optical coherence tomography

G. Guss, I. Bass, R. Hackel, C. Mailhiot, S. Demos
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引用次数: 13

Abstract

In this work, we present the first successful demonstration of a non-contact technique to precisely measure the 3D spatial characteristics of laser induced surface damage sites in fused silica for large aperture laser systems by employing Optical Coherence Tomography (OCT). What makes OCT particularly interesting in the characterization of optical materials for large aperture laser systems is that its axial resolution can be maintained with working distances greater than 5 cm, whether viewing through air or through the bulk of thick optics. Specifically, when mitigating surface damage sites against further growth by CO2 laser evaporation of the damage, it is important to know the depth of subsurface cracks below the damage site. These cracks are typically obscured by the damage rubble when imaged from above the surface. The results to date clearly demonstrate that OCT is a unique and valuable tool for characterizing damage sites before and after the mitigation process. We also demonstrated its utility as an in-situ diagnostic to guide and optimize our process when mitigating surface damage sites on large, high-value optics.
光学相干层析成像熔融二氧化硅表面损伤部位的高分辨率三维成像
在这项工作中,我们首次成功展示了一种非接触技术,通过光学相干断层扫描(OCT)精确测量大孔径激光系统中熔融二氧化硅激光诱导表面损伤部位的三维空间特征。使OCT在大孔径激光系统光学材料表征中特别有趣的是,无论是通过空气还是通过大块厚光学器件观察,其轴向分辨率都可以在大于5厘米的工作距离下保持。具体来说,当通过CO2激光蒸发损伤来减轻表面损伤部位的进一步增长时,了解损伤部位以下的次表面裂纹的深度是很重要的。当从地面上拍摄时,这些裂缝通常被损坏的碎石所掩盖。迄今为止的结果清楚地表明,OCT是一种独特而有价值的工具,可用于表征缓解过程前后的损伤部位。我们还展示了它作为原位诊断的实用性,以指导和优化我们的工艺,减轻大型高价值光学器件的表面损伤部位。
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