Modulation of Porous Silicon Morphology: Correlation with Dopant Concentration and Electrolyte Composition

Abstract

While there have been extensive reports in literature regarding the synthesis of porous silicon layers using electrochemical anodization for their use in different applications, systematic studies regarding the influence of the substrate dopant concentration and the electrolyte composition on the pore dimensions have not not been extensively investigated. In this work, we have systematically looked at the influence of dopant concentration and different electrolyte compositions on the pore dimensions of the porous silicon layer, along with varying input current density and reaction time.