The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 1: Open loop

T. Grigorie
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引用次数: 30

Abstract

The paper deal with an open loop analogue capacitive micro-accelerometer both from the point of view of mathematical modeling and through the achievement of certain numerical simulations which must confirm the mathematical models and in the same time help to establish the optimal architecture of the system. The capacitive transducer is one of differential type, with two fixed plates and one moving, which play the role of proof mass. Structure of the system contains the proper transducer and an electronic device (charge amplifier + phase-sensitive demodulator) to process the signal obtained from transducer. The accelerometer is mathematical modeled, the mathematical relation being expressed both in complex domain and in time. The mathematical modeling contains two distinct phases: the modeling of the proper accelerometer, which includes the proof mass and elastic element, and the modeling of the differential capacitive transducer for the proof mass displacements. Using these mathematical relations, the block schemas are realized for each block separately and for the full system. Starting from the numerical values of the accelerometer's parameters the numerical simulations with programming MATLAB/SIMULINK are made for each of the deduced block schemas.
模拟电容式微加速度计的Matlab/Simulink建模与数值仿真。第1部分:开环
本文对开环模拟电容式微加速度计进行了数学建模,并通过一定的数值仿真来验证数学模型,同时帮助建立系统的最优结构。电容式换能器为差动式,有两块固定极板和一块活动极板,起到防质量的作用。该系统的结构包括适当的换能器和处理从换能器获得的信号的电子装置(电荷放大器+相敏解调器)。对加速度计进行了数学建模,在复域和时间上分别表示了数学关系。数学建模包括两个不同的阶段:固有加速度计的建模,其中包括证明质量和弹性元件,以及差分电容式传感器的证明质量位移的建模。利用这些数学关系,分别实现了每个块和整个系统的块模式。从加速度计参数的数值出发,利用MATLAB/SIMULINK编程对推导出的各块结构进行了数值模拟。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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