Semiconductor surface characterization by scanning probe microscopies

M. Hietschold, Anne D. Mueller, Falk Mueller
{"title":"Semiconductor surface characterization by scanning probe microscopies","authors":"M. Hietschold, Anne D. Mueller, Falk Mueller","doi":"10.1117/12.435824","DOIUrl":null,"url":null,"abstract":"Besides the well-known 3D surface topography, scanning probe methods give access to a whole world of local physical information on solid surfaces. Here, we demonstrate opportunities given by scanning tunneling spectroscopy (STS) and scanning electrical force microscopy/spectroscopy. In this paper, we compare the wide-spread UHV-STM/STS technique with ambient SEFM/SEFS. After short description of the methods, some applications to semiconductor surfaces are discussed. Possibly SEFS has a great potential for local electronic spectroscopy in near future.","PeriodicalId":365405,"journal":{"name":"International Conference on Solid State Crystals","volume":"118 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-08-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Solid State Crystals","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.435824","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

Besides the well-known 3D surface topography, scanning probe methods give access to a whole world of local physical information on solid surfaces. Here, we demonstrate opportunities given by scanning tunneling spectroscopy (STS) and scanning electrical force microscopy/spectroscopy. In this paper, we compare the wide-spread UHV-STM/STS technique with ambient SEFM/SEFS. After short description of the methods, some applications to semiconductor surfaces are discussed. Possibly SEFS has a great potential for local electronic spectroscopy in near future.
用扫描探针显微镜表征半导体表面
除了众所周知的三维表面形貌外,扫描探针方法还可以访问固体表面的整个局部物理信息。在这里,我们展示了扫描隧道光谱(STS)和扫描电磁力显微镜/光谱所提供的机会。在本文中,我们比较了广泛的UHV-STM/STS技术和环境SEFM/SEFS。在简要介绍了这些方法之后,讨论了在半导体表面上的一些应用。在不久的将来,SEFS可能在局部电子能谱方面具有很大的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信