Maskless digital manufacturing of organic thin film transistor by femtosecond laser direct patterning

S. Ko
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引用次数: 1

Abstract

The small volume, large variety item manufacturing has been recognized as a next generation manufacturing scheme to satisfy the various demands from the customers. As a promising manufacturing technique, laser based maskless digital patterning emerged recently. Especially, the fabrication of metal nanopatterns on various substrates, such as glass and flexible polymers, has become important for various electronic device applications. In this study, we used the direct femtosecond laser sintering of metal nanocrystals to fabricate organic thin-film transistors. This process is an ultra-high-resolution direct metal patterning method in which the metal nanocrystals are sintered with a femtosecond laser beam to form high quality metal electrodes for the bottom gated organic thin film transistors with pentacene as an active layer. Organic thin-film transistors with PFBT treatments were demonstrated showing good performance with the mobility up to 0.0173 cm2/Vs. These results indicate that the femtosecond laser sintering of metal nanocrystals can be applied to numerous applications in electronics.
飞秒激光直接图像化有机薄膜晶体管的无掩模数字化制造
小批量、大品种的项目制造已被公认为下一代制造方案,以满足客户的各种需求。激光无掩模数字图形是近年来出现的一种很有前途的制造技术。特别是,在各种衬底(如玻璃和柔性聚合物)上制造金属纳米图案对于各种电子器件的应用已经变得非常重要。在本研究中,我们使用飞秒激光直接烧结金属纳米晶体来制备有机薄膜晶体管。该工艺是一种超高分辨率的直接金属图像化方法,利用飞秒激光束烧结金属纳米晶体,形成以五苯为活性层的底门控有机薄膜晶体管的高质量金属电极。经PFBT处理的有机薄膜晶体管表现出良好的性能,迁移率高达0.0173 cm2/Vs。这些结果表明,飞秒激光烧结金属纳米晶体在电子领域具有广泛的应用前景。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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