Investigation of charge-trap memories with AlN based band engineered storage layers

Abstract

This paper presents an in-depth investigation of the electrical properties of charge trap memories with AlN based storage layers. The memory performance and reliability are studied in details and compared with the ones of a reference device using standard Si₃N₄ as storage layer. An engineered charge trapping layer is also proposed, made by an AlN/Si₃N₄ double layer, which shows reduced program/erase voltages, combined with 10⁶ excellent endurance and good retention (ΔV_T>5V after 10 years at 125°C).