S. Konishi, M. Yoda, N. Hosaka, S. Sugiyama, S. Akishita
{"title":"Tunable acoustic absorbing system using a deep hole array","authors":"S. Konishi, M. Yoda, N. Hosaka, S. Sugiyama, S. Akishita","doi":"10.1109/MEMSYS.1998.659835","DOIUrl":null,"url":null,"abstract":"We present a tunable acoustic absorbing system. Most of the conventional acoustic absorbers can absorb an only sound of a fixed frequency. We propose an acoustic absorbing system with a tunable compliance in order to absorb variable sounds. The developed system forms an array of the Helmholtz resonator with a deep hole array by a X-ray lithography. Micro deep holes are effective at a low frequency. The resonator has an air cavity whose volume is controllable so as to tune its resonant frequency to a desired frequency. This paper reports characteristics of our developed acoustic absorbing system and our project status.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659835","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10
Abstract
We present a tunable acoustic absorbing system. Most of the conventional acoustic absorbers can absorb an only sound of a fixed frequency. We propose an acoustic absorbing system with a tunable compliance in order to absorb variable sounds. The developed system forms an array of the Helmholtz resonator with a deep hole array by a X-ray lithography. Micro deep holes are effective at a low frequency. The resonator has an air cavity whose volume is controllable so as to tune its resonant frequency to a desired frequency. This paper reports characteristics of our developed acoustic absorbing system and our project status.