On Modelling of Mass Transport for Formulation of Conditions for Increasing Integration Rate of Elements Framework Current Comparator. an Approach to Optimize of Technological Process

Abstract

In this paper we introduce an analytical approach to analyze mass and heat transport in heterostructures during manufacturing of integrated circuits with account nonlinearity of processes. The approach gives a possibility to analyze mass and heat transport in multilayer structures without crosslinking of solutions on interfaces between layers. The approach also gives a possibility to take into account spatial and temporal variation of parameters of considered processes. Based on this approach we analyzed manufacturing a current comparator to increase density of elements.