Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors

Abstract

Results on a tunable resonant cavity enhanced detector (RCED) in the mid-infrared employing a vertically moving, comb-drive actuated micromirror are presented. A wide tuning range of 0.7 mum and a low order configuration have been achieved with a micromirror displacement range of 2.5 mum and a reduction of the optical cavity length respectively.