{"title":"A multipoint diffraction strain sensor using micro-lens array: review on variable sensitivity","authors":"J. Wang, A. Asundi","doi":"10.1117/12.814564","DOIUrl":null,"url":null,"abstract":"A multipoint diffraction strain sensor (MDSS) in moire interferometer was developed earlier as direct approach for measuring strain of a macro-sized object. Recently a MDSS based on a micro-moire interferometer was proposed for measuring strain for a micro-sized object in wholefield with unique features, one of which is variable sensitivity and measurement range. The technique is now extended to measure both tilt and non-uniform strain of a material.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"37 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Laser Metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.814564","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A multipoint diffraction strain sensor (MDSS) in moire interferometer was developed earlier as direct approach for measuring strain of a macro-sized object. Recently a MDSS based on a micro-moire interferometer was proposed for measuring strain for a micro-sized object in wholefield with unique features, one of which is variable sensitivity and measurement range. The technique is now extended to measure both tilt and non-uniform strain of a material.