Highly integrated microfluidic sensors

Abstract

We have developed fabrication techniques for creating suspended electrically addressable MEMS structures in microfluidic channels, as well as monolithic integration of sensors within microfluidic devices. As we will demonstrate, creative use of state-of-the-art MEMS fabrication techniques allows the integrated manufacturing of a number of sensors, for simultaneous measurement of, for example, flow velocity, thermal conductivity and normal stress. We will demonstrate the versatility of these techniques with an example of capillary viscosity sensor integrating independent flowrate, temperature, and pressure drop sensors.