Design and fabrication of 1D and 2D micro scanners actuated by double layered PZT bimorph beams

Abstract

Micro scanners including 1D scanner beams and 2D scanning micromirrors are designed and fabricated. In order to yield great actuation force and large scanning angle, double layered PZT beams were developed in this study. In the case of 1D scanner beams (750/spl times/230 /spl mu/m/sup 2/), the optical scanning angle was 41.2 degree while driven dynamically with 5 V (AC) at 2706 Hz. Under the applied bias of 10 V (DC), the optical deflection angle reached 34.3 degree. Combined with four double layered PZT bimorph beams, a 2D scanning micromirror was fabricated successfully.