Micro-structuring of SiO/sub 2/ thin film on Si by a femto-second laser pulse

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468) Pub Date : 2001-10-31 DOI:10.1109/IMNC.2001.984146

K. Kawamura, N. Ito, M. Hirano, H. Hosono

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Abstract

In this paper report that micro-grating structures are holographically encoded in SiO/sub 2/ thin films on Si by colliding a pair of pulses split from a single high peak power fs-laser pulse using a Ti:sapphire laser.

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飞秒激光脉冲在Si上微结构SiO/ sub2 /薄膜

本文报道了用Ti:蓝宝石激光器将由单个峰值功率fs激光脉冲分裂的一对脉冲对撞，将微光栅结构全息编码在Si上的SiO/ sub2 /薄膜中。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Digest of Papers. Microprocesses and Nanotechnology 2001. 2001 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.01EX468)

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