Thermal stability of highly compressive strained germanium-tin (GeSn) grown by molecular beam epitaxy

Wei Wang, Qian Zhou, Jisheng Pan, Zheng Zhang, E. Tok, Y. Yeo
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Abstract

Highly strained Ge1-xSnx films were epitaxially grown on Ge(001), with x up to 0.17. Good crystalline quality and a relatively flat surface were obtained. Critical temperatures exist for Sn segregation for various x. XPS shows that the Sn surface segregation could occur at temperatures as low as 400 °C for Ge0.932Sn0.068.
分子束外延生长高压缩应变锗锡(GeSn)的热稳定性
在Ge(001)上外延生长出高应变的Ge1-xSnx薄膜,x高达0.17。获得了良好的结晶质量和相对平坦的表面。对于不同的x,存在着锡偏析的临界温度。XPS表明,ge0.932和sn0.068的表面锡偏析温度低至400℃。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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