A high performance magnetically suspended MEMS spinning wheel gyro

C. Dauwalter, J. C. Ha
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引用次数: 6

Abstract

A novel concept of a magnetically suspended spinning wheel gyro is described. The gyro is based on a novel, patented, planar magnetic actuator and position sensor configuration with a gyro wheel that is rotated by a multi-phase electromagnetic spin motor. The motor and actuator/sensor configurations, in addition to providing the necessary forces to suspend the spinning wheel, are amenable to fabrication using some of the developing MEMS fabrication technologies, making batch fabrication of the gyro possible. This will provide the capability for high production yield in high volume through the use of batch processing, without the need for skilled hand labor, resulting in high yields, high reliability and low cost of ownership. The gyro concept is described in detail. The high-speed rotation of the wheel, somewhat smaller than a dime, can produce an angular momentum much larger than that of the Coriolis force based MEMS gyros now receiving intensive development, and is expected to provide considerably higher performance than currently available from this class of instrument. Two axes of angular rate information and 3 axes of acceleration information are provided by the control loops that center the wheel within the case. Thus, two such magnetically suspended spinning wheel gyros can be used to implement a complete IMU, and can also provide redundancy in 4 of the 6 degrees of freedom.
一种高性能磁悬浮MEMS陀螺
提出了一种新型的磁悬浮陀螺概念。该陀螺仪基于一种新颖的、获得专利的平面磁致动器和位置传感器配置,陀螺仪轮由多相电磁自旋电机旋转。电机和致动器/传感器的配置,除了提供必要的力量,以暂停纺轮,适用于制造使用一些正在发展的MEMS制造技术,使批量制造的陀螺成为可能。这将通过使用批量处理提供高产量的能力,而不需要熟练的手工劳动,从而实现高产量,高可靠性和低拥有成本。详细介绍了陀螺的概念。车轮的高速旋转,比一角硬币小一些,可以产生比基于科里奥利力的MEMS陀螺仪大得多的角动量,现在正在进行密集的开发,预计将提供比目前这类仪器更高的性能。角速度信息的两个轴和加速度信息的3个轴是由控制回路中心的车轮在情况下提供的。因此,两个这样的磁悬浮旋转轮陀螺仪可以用来实现一个完整的IMU,并且还可以在6个自由度中的4个提供冗余。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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