Compact imprint system using driving power of stepping motor

Abstract

In this paper, we report on a newly developed step-and-repeat nano-imprint-lithography (NIL) system using driving power of stepping motor which has advantages that the system size is small and the precise control is possible by using a stepping motor instead of a hydraulic press. We have developed a compact imprint lithography system and demonstrated replication of 1 /spl mu/m patterns as preliminary experiment. Nanometer patterns and details of several key operating parameters will be discussed.