Comparison of Rigorous Coupled-Wave Analysis and Finite Difference Time Domain Method on Dielectric Gratings

Abstract

Diffraction efficiency in binary grating is analyzed by using the rigorous coupled-wave analysis (RCWA) and finite difference time domain method to verify applicability of RCWA. The simulation results show that RCWA has a similar accuracy as compared to FDTD but reduces calculating time by a factor of approximately 50.