High-performance folded-cavity surface-emitting InGaAs/GaAs lasers fabricated by ion-beam-etching technique

Abstract

High performance folded-cavity surface emitting lasers (FCSEL's) utilizing 45° deflection mirrors to couple the light in the horizontal cavity towards the surface are attractive devices for applications to optoelectronic integrated circuits. We report here low threshold current and high efficiency InGaAs/GaAs FCSEL's that employ high quality internal 45° deflectors. A simplified process involving a stop etch to position the surface emitting output mirror close to the waveguide and ion-beam-etching (IBE) to form the 45° deflecting mirror is presented.