HUMAN ERROR REDUCTION PROGRAM THROUGH CANONICAL ACTION RESEARCH (CAR) IN WAFER FABRICATION MANUFACTURING FACILITY

M. H. Saidin, N. Hasnan
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Abstract

In a wafer fabrication manufacturing facility, thousands of wafers are being processed daily. To manufacture the product, the wafers need to go thru hundreds of steps according to the technologies required. The cycle time to complete a standard product ranges from few weeks to few months, depends on the complexity of the technologies. Due to the difficulty and the complexity of the product, Computer Integrated Manufacturing system (CIM), is widely used as a manufacturing platform. As such, all the processes, equipment and wafers are fully integrated. Nevertheless, not all processes could be processed automatically. In the situation of the halfway processes wafer due to equipment or facility interruption, the wafer, need to be processed manually. Engineers or technicians will manually process the affected wafer according to the specification. The problem arises when; there is a human involvement that ends up with wafers misprocess. The potential revenue lost due to wafer misprocess is vast. Hence, this paper aims to discuss issues related to human error in manufacturing, specifically in Wafer Fabrication Manufacturing Facility. The paper presents partial input for the Canonical Action Research (CAR) that presently being exercised in order to minimize human error by developing a Small Group Activities (SGA) in the manufacturing facility.
通过规范行为研究(车)在晶圆制造工厂减少人为错误
在一个晶圆制造工厂里,每天要加工成千上万的晶圆。为了制造产品,晶圆需要根据所需的技术经历数百个步骤。完成一个标准产品的周期从几周到几个月不等,这取决于技术的复杂程度。由于产品的难度和复杂性,计算机集成制造系统(CIM)作为一种制造平台被广泛使用。因此,所有的工艺、设备和晶圆都是完全集成的。然而,并非所有进程都可以自动处理。在硅片加工中途由于设备或设施中断的情况下,硅片需要人工加工。工程师或技术人员将根据规格手工处理受影响的晶圆。问题出现在:由于人为因素,最终导致晶圆加工不当。晶圆加工不当造成的潜在收入损失是巨大的。因此,本文旨在讨论与制造中的人为错误有关的问题,特别是在晶圆制造设备中。本文介绍了规范行为研究(CAR)的部分输入,该研究目前正在执行,以便通过在制造设施中开发小组活动(SGA)来最大限度地减少人为错误。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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