A high performance vibration sensor with extended floating gate

Abstract

A novel CMOS vibration sensor with extended floating gate is developed with simple circuitry to realize high sensitivity, linearity, and manufacturability. A method to enhance linearity by varying capacitance coupling coefficient relative to total capacitance is proposed. The sensor can maintain linearity in a large displacement range and its measurement range also greatly increases (up to ±33g). The sensor can achieve a resolution of 0.05g, obtained by ANSYS and HSPICE simulations. HSPICE models for time varying capacitance and floating gate are also proposed. The sensor has ultra low power consumption of only 824.3 µW and may be able to operate with a single coin cell battery.