Hydride VPE: the unexpected process for the fast growth of GaAs and GaN nanowires with record aspect ratio and polytypism-free crystalline structure

Y. André, A. Trassoudaine, G. Avit, K. Lekhal, M. Ramdani, C. Leroux, G. Monier, C. Varenne, P. Hoggan, D. Castelluci, C. Bougerol, F. Réveret, J. Leymarie, E. Petit, V. Dubrovskii, E. Gil
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引用次数: 1

Abstract

Hydride Vapor Phase Epitaxy (HVPE) makes use of chloride III-Cl and hydride V-H3 gaseous growth precursors. It is known as a near-equilibrium process, providing the widest range of growth rates from 1 to more than 100 μm/h. When it comes to metal catalyst-assisted VLS (vapor-liquid-solid) growth, the physics of HVPE growth is maintained: high dechlorination frequency, high axial growth rate of nanowires (NWs) up to 170 μm/h. The remarkable features of NWs grown by HVPE are the untapered morphology with constant diameter and the stacking fault-free crystalline phase. Record pure zinc blende cubic phase for 20 μm long GaAs NWs with radii of 10 and 5 nm is shown. The absence of wurtzite phase in GaAs NWs grown by HVPE whatever the diameter is discussed with respect to surface energetic grounds and kinetics. Ni assisted, Ni-Au assisted and catalyst-free HVPE growth of wurtzite GaN NWs is also addressed. Micro-photoluminescence spectroscopy analysis revealed GaN nanowires of great optical quality, with a FWHM of 1 meV at 10 K for the neutral donor bound exciton transition.
氢化物VPE: GaAs和GaN纳米线快速生长的意外过程,具有创纪录的宽高比和无多晶性的晶体结构
氢化物气相外延(HVPE)利用氯化物III-Cl和氢化物V-H3气体生长前驱体。它被称为近平衡过程,提供从1到超过100 μm/h的最宽生长速率范围。当涉及到金属催化剂辅助VLS(气液固)生长时,HVPE生长的物理特性保持不变:高脱氯频率,纳米线(NWs)的高轴向生长速率高达170 μm/h。HVPE生长NWs的显著特征是具有恒定直径的非锥形形貌和无层错的晶相。在半径为10 nm和5 nm的20 μm长的GaAs NWs中,记录到了纯净的闪锌矿立方相。从表面能源和动力学的角度讨论了HVPE生长的GaAs NWs中纤锌矿相的缺失。还讨论了镍辅助、镍金辅助和无催化剂的纤锌矿GaN NWs的HVPE生长。微光致发光光谱分析表明,GaN纳米线具有良好的光学质量,中性供体束缚激子跃迁的FWHM在10 K下为1 meV。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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