Aperture arrays for subnanometer calibration of optical microscopes

2017 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2017-08-01 DOI:10.1109/OMN.2017.8051448

Craig R. Copeland, C. McGray, Jon C. Geist, J. A. Liddle, B. Ilic, S. M. Stavis

引用次数: 4

Abstract

We fabricate and test subresolution aperture arrays as calibration devices for optical localization microscopy. An array pitch with a relative uncertainty of approximately three parts in ten thousand enables localization with subnanometer accuracy.

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用于光学显微镜亚纳米定标的孔径阵列

我们制作并测试了亚分辨率孔径阵列作为光学定位显微镜的校准装置。相对不确定度约为万分之三的阵列间距可以实现亚纳米精度的定位。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2017 International Conference on Optical MEMS and Nanophotonics (OMN)

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