Establishment of An Advanced Diagnostic Technology by Conductivity

2018 International Symposium on Semiconductor Manufacturing (ISSM) Pub Date : 2018-12-01 DOI:10.1109/ISSM.2018.8651149

Akira Nakahira, Youske Inoue, Kazuyuki Fujii, K. Shirakawa, Hidehiko Kawaguchi

引用次数: 0

Abstract

We have established an advanced diagnostic technology by using conductivity between parts of semiconductor equipment from RF perspective. In this paper, we explain an outline of our method and report the results which show its effectiveness.

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先进电导率诊断技术的建立

我们已经建立了一种先进的诊断技术，从射频的角度利用半导体设备各部分之间的电导率。在本文中，我们解释了我们的方法的大纲，并报告了表明其有效性的结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2018 International Symposium on Semiconductor Manufacturing (ISSM)

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