New developments in silicon technology

Abstract

This paper addresses new developments related to silicon technology and silicon devices in the areas of high speed integrated circuits, intelligent sensors, solar cells and large area electronics. These areas benefit strongly from the rapid advances made in ULSI technology without directly needing lateral dimensions in the 100 nm region and the extremely high investments related to these. As such, they form highly relevant research areas, which can successfully be executed in an academic environment. As examples, silicon-on-anything technology, high speed biochemical analysis systems, high speed deposition systems for solar cells and a new approach for making location controlled high performance TFTs on glass substrates are discussed briefly.