Single Point Outer Mad Bonding Technology For High Pin Count Ceramic PGA

T. Ando, T. Tomioka, M. Nakazono, K. Atsumi, Y. Tane, J. Nakano, S. Hirata
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Abstract

A new ceramic pin grid array (PGA) package for industrial computers has been developed by applying tape automated bonding (TAB) technology to one of the largest (20 plpl square) and highest pin count (820pins) application specific integrated circuits (ASIC) available in the semiconductor industry. To fabricate this package, a series of TAB processes containing inner lead bonding (ILB), cutting and forming of TAB outer leads, solder sheet mounting, outer lead bonding (OLB). die attachment and lid sealing have been developed. The key to this assembly is that a single point bonding method at room temperature has been developed for fine pitch (90 pn pitch) interconnections between TAB outer leads and electrode pads on a wavy ceramic substrate. To realize single point TAB technology, the optimum design for a tape carrier and for electrode pad patterns on a ceramic substrate has been explored, a new bonding tool has been developed, and the optimum thickness of gold, plated on the electrode pads on the ceramic substrate, has been investigated. As a result of these investigations, outer lead bond strengths exceeding 30 gf, and bonding accuracy within kt10 p have been achieved. Degradation of bond strength by thermal cycle tests was not observed.
高引脚数陶瓷PGA单点外疯狂键合技术
通过将磁带自动键合(TAB)技术应用于半导体行业中最大(20 plpl平方)和最高引脚数(820引脚)应用特定集成电路(ASIC)之一,开发了一种用于工业计算机的新型陶瓷引脚网格阵列(PGA)封装。为了制造这个封装,一系列的TAB工艺包括内引线键合(ILB), TAB外引线的切割和成型,焊片安装,外引线键合(OLB)。开发了模具连接和盖子密封。这种组装的关键是在室温下开发了一种单点键合方法,用于在波浪形陶瓷衬底上的TAB外引线和电极垫之间进行细间距(90pn节距)互连。为了实现单点TAB技术,探索了陶瓷衬底上带载体和电极衬底图案的优化设计,开发了一种新的键合工具,并研究了陶瓷衬底上电极衬底上镀金的最佳厚度。这些研究的结果是,外引线结合强度超过30gf,结合精度在kt10p以内。热循环试验未观察到粘结强度的退化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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