UHF range single phase unidirectional transducers using new fabrication techniques

IEEE 1985 Ultrasonics Symposium Pub Date : 1900-01-01 DOI:10.1109/ULTSYM.1985.198480

K. Yamanouchi, Z. H. Chen, T. Meguro

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引用次数: 3

Abstract

'fit: d e s c r i b o and dcmonstratc: somc of n c w s i n g l e phasr: u n i d i r w t iona l t r a n s d u c c r s (SPUDI') I'or l o w loss SAW d e v i c c s i n C I I I rang!: u s ing nc:w f a b r i c a t ion t cchn iqLcs . Thc n c w SI~L1)'l's u t i I i z c t h c i n t c r n a l r ( : f l c c t i o n s cahscd b y t h o d i f f o r c n c c o f thr : thicknciss of mctal f i l m , o r b o t h of t h o t i i ff 'crcncc: of 1:1!:ctromr:chanicaI coup l ing c o c f f i c i t l n t s and mass loading c f f c c t . Thest: S P U I ) T ' s arr. l 'at ir icatod b y tht: scl f a l i g n d a n g l c cvapora t ion t t 'chniqucs which LSC on ly on[: photo mask anti no mask a i ignmcnt f'or t h c i n t c r d i g i t a l fingers. T h e i : l cc t rodo w i d t h s of t h e nc:w SPLD'f 's arc: about h / 4 ( A :SAW wavcl cngt h ) . Tht: f rcquency l i m i t a t ion is t h c r c f o r c almost thr: samc as t h a t for tht: convcnt iona l ID'I ' . l h c t h c o r c t i c a l analyst:^ havt: b w n d o n c , us ing tht: c q u i v a l c n t c i r c h i t model. Thi: r o s u l t s show thc low loss h c l o w 1 . O d H w i t h f r a c t i o n a l band w i d t h of about 4 % for 12%' Y X l , i N b O l . Also, cxpc:rimr:ntal r c s u l t s show a t l i r w t i v i t y of 10 .0l18 .0dH/ t ransduccr a t about 500MHz and 1 0 . 0 d H a t about 2GIlz.

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'fit： d e s c r i b o and dcmonstratc： somc of n c w s i n g l e phasr： u n i d i r w t iona l t r a n s d u c c r s (SPUDI') I'or l o w loss SAW d e v i c c s i n C I I I rang！： u s ing nc：w f a b r i c a t ion t cchn iqLcs。Thc n c w SI~L1)'l's u t i I i z c t h c i n t c r n a l r ( : f l c c t i o n s cahscd b y t h o d i f o r c n c c o f thr : thicknciss of mctal f i l m , o r b o t h of t h o t i i f f 'crcncc: of 1:1！ctromr:chanicaI coup l ing c o c f i c i t l n t s and mass loading c f f c c t .st：S P U I ) T ' s arr. l 'at ir icatod b y tht: scl f a l i g n d a n g l c cvapora t ion t t 'chniqucs which LSC on ly on[: photo mask anti no mask a i ignmcnt f'or t h c i n t c r d i g i t a l fingers.SPLD 的弧度约为 h / 4 （A :SAW wavcl cngt h）。其频率几乎与ID'I的频率相同。结果表明，损失率较低 1 .O d H w i t h f r a c t i o n a l band w i d t h of about 4 % for 12%' Y X l , i N b O l .此外，cxpc:rimr:ntal r c s u l t s 显示，在约 500MHz 和 1 0 .0dH a t ransduccr a t about 2GIlz.

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IEEE 1985 Ultrasonics Symposium

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