Effect of textures on elastic constants of Cu thin films

L. Chen
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引用次数: 0

Abstract

Due to their influence on the mechanical properties, residual stresses in thin films have become an important topic in materials science. The elastic constants are required to determine the residual stresses using X-ray diffraction method. The elastic constants of Cu thin films with ideal fibre textures were calculated using the Voigt, Reuss and Hill model in the present work. The results show that the elastic constants are strongly dependent on their textures. When textures exist within Cu thin films, the matrix of the elastic constants converted from cubic symmetry to hexagonal symmetry. In order to analyze the effect of the textures on the elastic constants of Cu thin films quantitatively, the relationship between the elastic constants and textures was derived by the orientation distribution function.
织构对Cu薄膜弹性常数的影响
由于残余应力对材料力学性能的影响,薄膜中的残余应力已成为材料科学研究的重要课题。用x射线衍射法确定残余应力需要弹性常数。本文采用Voigt, Reuss和Hill模型计算了具有理想纤维织构的Cu薄膜的弹性常数。结果表明,弹性常数与材料的织构密切相关。当Cu薄膜中存在织构时,弹性常数矩阵由立方对称转变为六方对称。为了定量分析织构对Cu薄膜弹性常数的影响,利用取向分布函数推导了织构与Cu薄膜弹性常数的关系。
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