{"title":"Effect of textures on elastic constants of Cu thin films","authors":"L. Chen","doi":"10.1109/IPFA.2009.5232652","DOIUrl":null,"url":null,"abstract":"Due to their influence on the mechanical properties, residual stresses in thin films have become an important topic in materials science. The elastic constants are required to determine the residual stresses using X-ray diffraction method. The elastic constants of Cu thin films with ideal fibre textures were calculated using the Voigt, Reuss and Hill model in the present work. The results show that the elastic constants are strongly dependent on their textures. When textures exist within Cu thin films, the matrix of the elastic constants converted from cubic symmetry to hexagonal symmetry. In order to analyze the effect of the textures on the elastic constants of Cu thin films quantitatively, the relationship between the elastic constants and textures was derived by the orientation distribution function.","PeriodicalId":210619,"journal":{"name":"2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2009.5232652","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Due to their influence on the mechanical properties, residual stresses in thin films have become an important topic in materials science. The elastic constants are required to determine the residual stresses using X-ray diffraction method. The elastic constants of Cu thin films with ideal fibre textures were calculated using the Voigt, Reuss and Hill model in the present work. The results show that the elastic constants are strongly dependent on their textures. When textures exist within Cu thin films, the matrix of the elastic constants converted from cubic symmetry to hexagonal symmetry. In order to analyze the effect of the textures on the elastic constants of Cu thin films quantitatively, the relationship between the elastic constants and textures was derived by the orientation distribution function.