Characterization of cMUT by Dynamic Holography Microscopy

Abstract

The comparison of numerical simulations to real cMUT behavior is essential to assess and optimize the process. For a complete characterization multiple devices (FIB, SEM, impedancemetry, laser interferometry, ...) are needed. In this context, we propose to use a full-field measurement device, a Digital Holography Microscopy (DHM Lynceetec®), which acquires static and dynamic in-plane and out-of-plane information of membranes population in a single acquisition and then provides most of required parameters. This paper presents the principle of this device, its performances comparing to other ones and its limits.