A production performance database and query software for integrated circuit manufacturing

Abstract

The author describes a production performance database that allows engineers and shop managers of integrated-circuit factories to monitor the performance of their facilities. The database combines actual processing data from the production systems with estimates of processing times to give a measure of how efficiently the facilities are being used. In addition, the database contains other performance measures such as queuing delays and production time variances. The users access the data through two menu-driven programs. One program uses window-based software to display the clean room areas, facilities, and facility groups for which data are available. The user needs only to type a single-word command to run the software and is prompted for all inputs through menus. The other program is an interactive report generator that allows the user to customize a report to suit his or her needs. The program leads the user through a series of questions to determine which area, time interval, performance measures, and report formats he or she would like to use. Engineers and shop managers have used both programs to track the performance of particular facilities and facility groups and to identify problem areas.<>