A Study on Combination of ENEPIG Surface Finish and Solder Ball for Solder Joint Reliability

Geondu Gim, Jong-beom Park, Hunju Lim, Gook-Yong Jung
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引用次数: 2

Abstract

An electroless nickel (Ni)/electroless palladium (Pd)/immersion gold (Au) (ENEPIG) surface finish is widely applied to substrates used in various semiconductor packages. However, many issues have been arising in terms of solder joint reliability (SJR) during the assembly process. A number of factors can affect SJR such as thickness of each layer of ENEPIG, reflow profile, plating bath conditions, chemical composition of Pd and Ni layer, and chemical composition of solder balls. This paper focuses on investigating the influence of the factors on SJR and formation of intermetallic compounds (IMCs). The present study investigated the effect of the number of reflows (1, 3 and 5), Ni and Pd thickness of ENEPIG (Ni: 3, 6 and 9 µm, Pd: 0.02, 0.06 and 0.1 µm), chemical composition of Pd layer (pure Pd and Pd-phosphorus (P)) and chemical composition of solder balls (tin (Sn)0.7copper (Cu), SAC305 (Sn3.0 silver (Ag) 0.5Cu), SAC302 (Sn3.0Ag0.2Cu) and Sn3.5Ag). Special focus involved the combination of solder balls (SAC305 and Sn3.5 Ag) and chemical composition of the Pd layer (pure Pd and Pd-P). SJR that were evaluated through pull test and shear test, and then IMCs were observed through scanning electron microscope (SEM) analysis. The effect of Pd and Ni thickness with Pd-P and pure Pd was confirmed. Compared to Pd-P ENEPIG, a relatively high risk of SJR was found when using solder ball with no or low Cu content (e.g., SAC302 and Sn3.5Ag) and pure Pd ENEPIG. As a result of SEM analysis, Kirkendall voids were observed in the Ni2SnP IMC layer only on pure Pd ENEPIG with Sn3.5Ag solder balls and the fracture occurred along the void line. For Sn3.5Ag, a thicker P-rich layer (around 700 µm) was formed compared to SAC305 (300µm).
ENEPIG表面光洁度与焊锡球相结合提高焊点可靠性的研究
化学镀镍(Ni)/化学镀钯(Pd)/浸金(Au) (ENEPIG)表面处理广泛应用于各种半导体封装中使用的衬底。然而,在组装过程中出现了许多关于焊点可靠性(SJR)的问题。影响SJR的因素有很多,如ENEPIG各层厚度、回流曲线、镀液条件、Pd和Ni层的化学成分、焊料球的化学成分等。本文重点研究了各种因素对SJR和金属间化合物(IMCs)形成的影响。本研究考察了回流次数(1、3和5)、ENEPIG的Ni和Pd厚度(Ni: 3、6和9µm, Pd: 0.02、0.06和0.1µm)、Pd层化学成分(纯Pd和Pd-磷(P))和焊料球化学成分(tin (Sn)0.7copper (Cu)、SAC305 (Sn3.0 silver (Ag) 0.5Cu)、SAC302 (Sn3.0 ag0.2 Cu)和Sn3.5Ag)的影响。特别关注的是焊料球(SAC305和Sn3.5 Ag)的组合和Pd层的化学成分(纯Pd和Pd- p)。通过拉伸试验和剪切试验对其SJR进行评价,然后通过扫描电镜(SEM)分析IMCs。证实了Pd- p和纯Pd对Pd和Ni厚度的影响。与Pd- p ENEPIG相比,使用不含或低铜含量(如SAC302和Sn3.5Ag)的焊球和纯Pd ENEPIG时,SJR的风险相对较高。SEM分析表明,仅在含Sn3.5Ag钎料球的纯Pd ENEPIG上,Ni2SnP IMC层出现了Kirkendall空洞,且沿空洞线断裂。与SAC305(300µm)相比,Sn3.5Ag形成了更厚的富p层(约700µm)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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