Ultralow-temperature catalyst-induced-crystallization of SiGe on plastic for flexible electronics

Abstract

Development of a low-temperature (≤250°C) formation technique of orientation-controlled large-grain (<;10 μm) SiGe on insulator is essential to realize flexible electronics, where various advanced devices are integrated on flexible plastic substrates (softening temperature: ~300°C). This is because SiGe provides higher carrier mobility and superior optical properties compared with Si, as well as epitaxial template of various functional materials. In line with this, we have been developing metal-induced crystallization of SiGe. This achieves selectively (100)- or (111)-oriented large-grain (≥20 μm) SiGe at low temperatures (~250°C) [1-4]. Present paper reviews our recent progress in this novel growth technique.