Strain Properties of Film Systems Based on Fe and Pd as Sensitive Elements of Flexible Electronics

O. P. Tkach, I. Cheshko, M. Vasyukhno, L. Odnodvorets, S. Protsenko
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Abstract

On the basis of strain properties study at the room temperatures, it was established that the transition from elastic to quasi-elastic deformation in Pd/Fe samples is on the range 0,3-0,4%, and shifts toward large deformations in multilayes. For two-layer samples and multilayers based on Pd and Fe with layer thickness from 5 to 40 nm, a size dependence of the strain coefficient is obtained, the value of which from 6 to 13 units.
柔性电子敏感元件Fe和Pd薄膜系统的应变特性
在室温应变特性研究的基础上,确定了Pd/Fe试样从弹性变形到准弹性变形的转变范围为0,3 ~ 0,4%,并向多层大变形方向转变。对于层厚为5 ~ 40 nm的两层和多层Pd、Fe样品,应变系数具有尺寸依赖性,其值为6 ~ 13个单位。
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