Array of niobium nanotips formed in porous anodic alumina matrix

V. Surganov, G. Gorokh
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引用次数: 8

Abstract

New fabrication method of nanoscale regular tips for vacuum microelectronics basing on electrochemical anodizing double- layer systems aluminum-niobium in aqueous acid electrolyte has been developed. This method allows providing very small overall emitted size and high uniform packaging densities without lithography and etching technique. Electron field emission from array of niobium nanotips formed in porous anodic alumina matrix has been investigated.
在多孔阳极氧化铝基体上形成的铌纳米尖阵列
提出了一种在酸性电解液中电化学阳极氧化铝铌双层体系制备真空微电子纳米规则针尖的新方法。这种方法允许提供非常小的整体发射尺寸和高均匀的封装密度,而不需要光刻和蚀刻技术。研究了在多孔阳极氧化铝基体上形成的铌纳米尖阵列的电子场发射。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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