MEMS structure: micromirror array

Abstract

The core of the project has been to design a moveable micro mirror array with the most optimal dependence of the optically active area, the deflection angles and the micro mirror power consumption, while keeping the cost of the chip as low as possible. The matrix of 20 X 20 micromirrors uses an electrostatically actuated principle. The array is designed using the Three Layer Polysilicon Surface Micro machining Process technology. Each micro mirror has two torsion springs and the size of the reflected plate is 70 X 70 micrometers . The penetration of the reflected micro mirror array is about 70 percent. The micro mirror array is addressed by 36 pads that are connected to the top and bottom electrodes. Potential connected between electrodes is used for the actuation of micro mirror. For the first step, we have designed 20 types of micromirrors, which differ in geometrical sizes and thickness of the micro mirror plates. The dilation angle of the micro mirror is 1.7 or 2.3 degrees defending on the type of the micro mirror.